Lithography-free microfabrication of AlGaN/GaN 2DEG strain sensors using laser ablation and direct wirebonding

Published in Microelectronic Engineering, 2017

Recommended citation: Dowling, K.M., So, H., Toor, A., Chapin, C.A., and Senesky, D.G., “Lithography-free microfabrication of AlGaN/GaN 2DEG strain sensors using laser ablation and direct wirebonding,” Microelectronic Engineering, vol. 173, pp54-57, 2017 https://doi.org/10.1016/j.mee.2017.03.012