Multilayer Etch Masks for 3-Dimensional Fabrication of Robust Silicon Carbide Microstructures

Published in IEEE MEMS Conference, 2015

Recommended citation: Dowling, K., Suria, A., Shankar, A., Chapin, C., Senesky, D. “Multilayer Etch Masks for 3-Dimensional Fabrication of Robust Silicon Carbide Microstructures,” presented at IEEE MEMS Conference at Estoril, Portugal. Jan 18-22, 2015, pp 284-287., acceptance rate 41%. https://doi.org/10.1109/MEMSYS.2015.7050944