High Sensitivity, High Density Micro-Hydraulic Force Sensor Array Using Stereo-Lithography Fabrication Technique

Published in IEEE MEMS Conference, 2013

Recommended citation: Sadeghi, M.M., Dowling, K., Peterson, R.L., Najafi, K. “High Sensitivity, High Density Micro-Hydraulic Force Sensor Array Using Stereo-Lithography Fabrication Technique,” presented at IEEE MEMS Conference at Taipei, Taiwan. Jan 20-24, 2013, pp 673-676., acceptance rate 40%. https://doi.org/10.1109/MEMSYS.2013.6474332