Inverted pyramid 3-axis silicon Hall-effect magnetic sensor with offset cancellation

Published in Microsystems & Nanoengineering, 2025

Recommended citation: Ruggeri. J., Ausserlechner. U.,Koeck, H., Dowling, K.M., “Inverted pyramid 3-axis silicon Hall-effect magnetic sensor with offset cancellation,” Microsyst Nanoeng, vol. 11, no. 26, 2025. https://doi.org/10.1038/s41378-025-00876-9