3D Hall-Effect Magnetometer Using a Single Inverted Pyramid Structure

Published in IEEE MEMS conference 2024, 2024

Recommended citation: Ruggeri. J., Strube. J., Dowling, K.M., “3D Hall-Effect Magnetometer Using a Single Inverted Pyramid Structure,” 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), 2024. https://doi.org/10.1109/MEMS58180.2024.10439529