Lithography and Etching?Free Microfabrication of Silicon Carbide on Insulator Using Direct UV Laser Ablation

Published in Advanced Engineering Materials, 2020

Recommended citation: Nguyen, T.-K., Phan, H.-P., Dowling, K.M., Yalamarthy, A.S., Dinh, T., Balakrishnan, V., Liu, T., Chapin, C.A., Truong, Q.-D., Dau, V.T., Goodson, K.E., Senesky, D.G., Dao, D.V., Nguyen, N-T., Lithography and Etching-Free Microfabrication of Silicon Carbide on Insulator Using Direct UV Laser Ablation, Advanced Engineering Materials, vol. 22, 4, p. 1901173, 2020. https://doi.org/10.1002/adem.201901173